Electron interactions with plasma processing gases – Progress of magnetized electron-impact total cross section measurement system(ELECS-1)
2011; Elsevier BV; Volume: 11; Issue: 5 Linguagem: Inglês
10.1016/j.cap.2011.03.035
ISSN1878-1675
AutoresDae Chul Kim, Mi‐Young Song, Yonghyun Kim, Young‐Woo Kim, Young Rock Choi, Jung‐Sik Yoon, Hyck Cho,
Tópico(s)Atomic and Molecular Physics
ResumoElectron-impact cross sections for molecular targets, including their radicals, are important in developing plasma reactors and testing various plasma processing gases. However, we suffer from lack of theoretical and experimental electron-impact cross section data for plasma processing gas, such as plasma etching and deposition processes. Thus, in this work, the total cross sections for electron scattering from plasma processing gases has been developed using magnetized beam formation in the low- and intermediate-energy region.
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