Artigo
Electron-impact total cross sections for plasma pro- cessing gases using magnetized beam formation method
2011; Cambridge University Press; Linguagem: Inglês
ISSN
0003-0503
AutoresDae-Chul Kim, Young-Rock Choi, Yonghyun Kim, Young‐Woo Kim, Jung-Sik Yoon, Hyck Cho,
Tópico(s)Metal and Thin Film Mechanics
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