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Artigo Revisado por pares

Shaoyue Wang, Yang Shen, Chongwei Liao, Jianwei Jing, Changjun Liu,

A novel injection-locked ${S}$ -band microwave oven magnetron system is proposed, analyzed, and experimented. The magnetron is considered as a two-port oscillator, and ... first time that microwaves have been injected through magnetron filaments. The microwave is injected into the magnetron filter box using a self-designed injection structure, ... through filament leads. The intrinsic isolation between the magnetrons' output and filament is utilized as an isolator. ... or couplers between the injection source and the magnetron were used in the system, resulting in low ...

Tópico(s): Radio Frequency Integrated Circuit Design

2023 - Institute of Electrical and Electronics Engineers | IEEE Transactions on Electron Devices

Revisão Revisado por pares

Patibandla Anilkumar, Pamu Dobbidi, Tapeshwar Tiwari,

... destructive testing (NDT), and food processing systems. Various magnetrons with discrete designs emerged depending on the structure ... output power, and desired frequency. Continuous-wave (CW) magnetrons are being used for industrial purposes, and pulse magnetrons are used for linear accelerator (linac) devices. High power pulse magnetron is an efficient microwave source used in medical ... NDT. A drastic change in the development of magnetron and various advances came across to enhance efficiency, ... an overview of the development of high-power magnetron and its subparts from 1869 to today. In ...

Tópico(s): Acoustic Wave Resonator Technologies

2022 - Taylor & Francis | IETE Technical Review

Artigo

Yitian Ma, Li Li, Ji Qian, Wenjie Qu, Rui Luo, Feng Wu, Renjie Chen,

... further improve the electrochemical performance of the batteries. Magnetron sputtering is a physical vapor deposition technique that ... strong film adhesion. These merits have led to magnetron sputtering being widely applied in the preparation and ... batteries. This review provides a systematic summary on magnetron sputtering in terms of lithium batteries: 1) The development of magnetron sputtering structure and mechanism is summarized, and a detailed comparison of advantages between magnetron sputtering and other vapor deposition equipment, including Atomic ...

Tópico(s): Semiconductor materials and devices

2021 - Elsevier BV | Energy storage materials

Artigo Acesso aberto Revisado por pares

Y. Y. Lau, Drew A. Packard, Christopher J. Swenson, J.W. Luginsland, Dion Li, Abhijit Jassem, Nicholas Jordan, R. D. McBride, R. M. Gilgenbach,

... solutions in crossed-field diodes, with applications to magnetrons, magnetically insulated line oscillators (MILOs), and magnetically insulated ... solutions are constructed for various geometries, including planar magnetrons, MILOs, and MITLs, cylindrical magnetrons with electrons flowing in the azimuthal direction, cylindrical ... provided externally by a magnet (as in a magnetron) or by the wall currents without an external ... two, as in the intermediate case of a magnetron–MILO hybrid. Once these two parameters are specified, ...

Tópico(s): Electromagnetic Simulation and Numerical Methods

2021 - Institute of Electrical and Electronics Engineers | IEEE Transactions on Plasma Science

Artigo Revisado por pares

Yongjie Zhou, Yi Zhang, Huacheng Zhu, Yang Yang,

Magnetron is an important microwave device because of its advantages of high power, small size, lightweight, and low cost. However, due to the instability of magnetron spectrum, it is difficult to use magnetron when we need high-stability spectrum. In order to improve the output spectrum of the magnetron, many efforts have been made and we find that the ripple of magnetron power supply has a great influence on the ... First, we start from the equivalent circuit of magnetron, from which we can derive the equation of ...

Tópico(s): Metamaterials and Metasurfaces Applications

2021 - Institute of Electrical and Electronics Engineers | IEEE Transactions on Electron Devices

Artigo Acesso aberto Revisado por pares

Dmitrii Andreev, Artem Kuskov, Edl Schamiloglu,

The cavity magnetron is the most compact, efficient source of high-power microwave (HPM) radiation. The imprint that the magnetron has had on the world is comparable to ... of the nuclear bomb. High- and low-power magnetrons are used in many applications, such as radar ... and industrial use. Since the invention of the magnetron in 1921 by Hull, scientists and engineers have improved and optimized magnetron technology by altering the geometry, materials, and operating ... by identifying applications. A major step in advancing magnetrons was the relativistic magnetron introduced by Bekefi and ...

Tópico(s): Microwave Engineering and Waveguides

2019 - American Institute of Physics | Matter and Radiation at Extremes

Artigo Revisado por pares

Zhenlong Liu, Xiaojie Chen, Meng‐Lin Yang, Kama Huang, Changjun Liu,

A high power gain magnetron amplifier with output phase control based on load-pull characterization has been developed. The equivalent resonant cavity method was first introduced to facilitate the proposed magnetron amplifier system as a basic injection model, and ... equation. It is the first time that a magnetron has been locked at a 58-dB gain. The magnetron amplifier shows an enhanced power-added efficiency of ... dB. This is the first time a successful magnetron output phase control based on load-pull at ...

Tópico(s): GaN-based semiconductor devices and materials

2018 - Institute of Electrical and Electronics Engineers | IEEE Transactions on Plasma Science

Artigo Acesso aberto Revisado por pares

André Anders,

High Power Impulse Magnetron Sputtering (HiPIMS) is a coating technology that combines magnetron sputtering with pulsed power concepts. By applying power in pulses ... target gases are ionized. In contrast to conventional magnetron sputtering, HiPIMS is characterized by self-sputtering or ... systematic, step-by-step approach by covering sputtering, magnetron sputtering, reactive magnetron sputtering, pulsed reactive magnetron sputtering, HiPIMS, and finally R-HiPIMS. The tutorial ... of R-HiPIMS known as modulated pulsed power magnetron sputtering and deep-oscillation magnetron sputtering and combinations ...

Tópico(s): Copper Interconnects and Reliability

2017 - American Institute of Physics | Journal of Applied Physics

Artigo Revisado por pares

Heping Huang, Yu Wei, Xiaojie Chen, Kama Huang, Changjun Liu,

... cell simulation model of a commercial industrial heating magnetron is developed as a guide for improving a fixed-output-power magnetron. After this improvement, the magnetron is transformed into a 20-kW power-adjustable phase-locked magnetron, which can then be injection-locked with tunable ... ever, the output power of the injection-locked magnetron is continuously tuned from 2 to 19 kW. This large-power magnetron is both phase and amplitude controlled, and is useful for the coherent power combining of multiple magnetrons. The magnetron frequency pushing effect, which affects the ...

Tópico(s): Metamaterials and Metasurfaces Applications

2017 - Institute of Electrical and Electronics Engineers | IEEE Transactions on Plasma Science

Artigo Revisado por pares

Dong Pan, Haibo Fan, Zan Li, Siyi Wang, Yinhao Huang, Yang Jiao, Yao He-bao,

... oxide (TiO2/FTO) substrates by using radio frequency magnetron sputtering. The as-prepared films were characterised and ... sol–gel processes [[24]]. Compared with these methods, magnetron sputtering has obvious well-controlled [[25]] and large- ... FTO (TiO2/FTO) substrates, using radio frequency (RF) magnetron sputtering to understand the role of the substrate ... films TiO2 thin films were prepared with RF magnetron sputtering on two types of substrates, quartz glass ... two types of substrates were prepared by RF magnetron sputtering method. It has been demonstrated experimentally that ...

Tópico(s): Gas Sensing Nanomaterials and Sensors

2016 - Institution of Engineering and Technology | Micro & Nano Letters

Artigo Revisado por pares

R. Jertz, Jochen Friedrich, Claudia Kriete, Е. Н. Николаев, Gökhan Baykut,

... cyclotron resonance spectrometry (FT-ICR MS) the ion magnetron motion is not usually directly measured, yet its ... In this work, the relationship between the ion magnetron motion in the ICR cell and the intensities ... towards one of the excitation electrodes. Consequently, a magnetron orbit diameter can increase or decrease during a ... been developed to study this behavior of the magnetron motion by acquiring a series of FT-ICR ... interpret the size and the position of the magnetron orbit. Ion motion simulations show that an off- ...

Tópico(s): Analytical Chemistry and Chromatography

2015 - American Chemical Society | Journal of the American Society for Mass Spectrometry

Artigo Acesso aberto Revisado por pares

Grigory Kazakevich, R. P. Johnson, G. Flanagan, Frank Marhauser, Vyacheslav Yakovlev, Brian Chase, Valeri Lebedev, Sergei Nagaitsev, R. Pasquinelli, N. Solyak, Kenneth Quinn, Daniel Wolff, В. М. Павлов,

... high-power transmitter utilizing the Continuous Wave (CW) magnetrons, injection-locked by phase-modulated signals, and intended ... transmitter consists of two 2-cascade injection-locked magnetrons with outputs combined by a 3-dB hybrid. ... was modelled using CW, S-Band, 1 kW magnetrons. A wideband dynamic control of magnetrons, required for the superconducting linacs, was realized using the magnetrons, injection-locked by the phase-modulated signals. The capabilities of the magnetrons injection-locked by the phase-modulated signals and ...

Tópico(s): Superconducting Materials and Applications

2014 - Elsevier BV | Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment

Artigo Revisado por pares

Andrey D. Andreev, Kyle J. Hendricks,

... a strapped nonrelativistic ultrahigh- frequency (890-915 MHz) magnetron whose geometrical and operational parameters are close to the parameters of the high- power industrial heating magnetron producing 75-100 kW of continuous-wave microwave power. Simulations of the magnetron operation are performed without artificial RF priming, but rather in natural conditions, when magnetron oscillations start to grow from electromagnetic “noise.” This ... important details of the “preoscillating” phase of the magnetron operation. It is found, for example, that the ...

Tópico(s): Pulsed Power Technology Applications

2012 - Institute of Electrical and Electronics Engineers | IEEE Transactions on Plasma Science

Artigo Brasil Produção Nacional Revisado por pares

Julio César Sagás, Diego Alexandre Duarte, Sara Fernanda Fissmer,

Current–voltage relations at different magnetron sputtering systems and gas mixtures were studied during reactive sputter deposition of titanium dioxide thin films. The main goal of this ... the discharge. The geometries utilized were the conventional magnetron sputtering, hollow cathode magnetron sputtering and triode magnetron sputtering. A change in the system geometry leads ... the working range of the discharge voltage and magnetron efficiency. It is noticed that the discharge voltage ... reduced when the geometry is altered from conventional magnetron to hollow cathode magnetron or triode magnetron, at ...

Tópico(s): Electronic and Structural Properties of Oxides

2011 - Elsevier BV | Vacuum

Artigo Revisado por pares

Andrey D. Andreev, Kyle J. Hendricks,

Modern CW industrial heating magnetrons are capable for producing as high as 300 kW of continuous-wave microwave power at frequencies around 900 MHz and ... Wynn et al., 2004]. However, to utilize these magnetrons in some specific research and scientific applications being ... model of a 10-vane high-power strapped magnetron, which geometrical dimensions and design parameters are close ... in-Cell (ICEPIC) code. Simulations of the strapped magnetron operation are performed and the following operational characteristics ...

Tópico(s): Ammonia Synthesis and Nitrogen Reduction

2010 - Taylor & Francis | Journal of Microwave Power and Electromagnetic Energy

Artigo Revisado por pares

A. Wiatrowski, W. M. Posadowski, Z. J. Radzimski,

The magnetron sputtering has become one of the commonly used techniques for industrial deposition of thin films and coatings due to its simplicity and reliability. At standard magnetron sputtering conditions (argon pressure of ∼0.5Pa) inert ... contamination can be eliminated during the self-sustained magnetron sputtering (SSS) process, where the presence of the ... been shown that the self-sustained mode of magnetron operation can be obtained using dc powering (dc- ... be temporarily extinguished to prevent damaging both the magnetron source and power supply. The authors postulate that ...

Tópico(s): Copper Interconnects and Reliability

2008 - American Institute of Physics | Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Artigo Revisado por pares

X.-W. Tang, Shengjie Jiao, Zhihua Gao, Xinxin Xu,

... solve the problems of the 2.45 GHz magnetron used in asphalt pavement maintenance as the longer ... the paper brings forward the 5.8 GHz magnetron using in asphalt pavement maintenance. CST and ANSYS ... using 2.45 GHz and 5.8 GHz magnetron. Then the experimental verification was carried through. The 5.8 GHz magnetron can be used effectively in asphalt pavement maintenance. ... temperature rising rate of the 5.8 GHz magnetron heating asphalt pavement is 2–3 times of 2.45 GHz magnetron in the distance within 0–75 mm of ...

Tópico(s): Antenna Design and Analysis

2008 - Taylor & Francis | Journal of Electromagnetic Waves and Applications

Artigo Revisado por pares

Y.N. Kok, Peter Kelly,

The mid-frequency (20–350 kHz) pulsed magnetron sputtering process has been reported as an enabling technology for the deposition of a wide range of commercially important coatings onto large area ... titania (TiO2) coatings were deposited by reactive unbalanced magnetron sputtering in a Large Area rig built 'in- ... kHz) modes. The films were deposited under different magnetron configurations; single and dual planar magnetrons operated in conventional mode, and dual planar magnetrons operated in full-face erosion (FFE) mode. A ...

Tópico(s): ZnO doping and properties

2007 - Wiley | Plasma Processes and Polymers

Artigo Revisado por pares

Jianliang Lin, John J. Moore, Brajendra Mishra, W.D. Sproul, J.A. Rees,

Pulsed DC magnetron sputtering was developed initially as a means of suppressing the arcing at the target during reactive sputtering. More recently, pulsing the magnetrons has also been shown to modify the intrinsic ... paper examines the effect of pulsing the unbalanced magnetrons in a two-cathode closed field configuration on ... in this two-cathode pulsed-closed field unbalanced magnetron sputtering (P-CFUBMS) system. The pulsing parameters examined ... synchronized (voltage-time wave forms of the two magnetrons were in phase) and asynchronized (voltage-time wave ...

Tópico(s): Plasma Diagnostics and Applications

2006 - Elsevier BV | Surface and Coatings Technology

Artigo Revisado por pares

Xiang Yu, Wang Cheng-biao, Yang Liu, Yu Deyang, Tingyan Xing,

The principle of magnetron sputtering is introduced and the balanced and unbalanced magnetrons are compared and the necessity of unbalanced magnetrons is explained as well. Several recent developments in plasma magnetron sputtering, i.e., unbalanced magnetron sputtering, pulsed magnetron sputtering and ion assisted sputtering, are discussed. The recent developments of unbalanced magnetron systems and their incorporation with ion sources result in an understanding in growing importance of the magnetron sputtering technology, which makes the technology an applicable ...

Tópico(s): Copper Interconnects and Reliability

2006 - IOP Publishing | Plasma Science and Technology

Artigo Revisado por pares

Kyung H. Nam, Min J. Jung, Jeon G. Han, T. Kopte, U. Hartung, C. Peters,

A novel magnetron sputtering system, which included simply designed two grids between target and substrate, was developed in our laboratory for ... order to investigate the effect of grids assisted magnetron sputtering, MgO films were deposited by conventional magnetron, one grid assisted magnetron and two grids assisted magnetron. The saturated ion current density and Mg ion fraction in MgO discharges generated by grids assisted magnetron were increased in comparison with those obtained in conventional magnetron, which means that grids assisted magnetron led to ...

Tópico(s): Magnesium Oxide Properties and Applications

2004 - Elsevier BV | Vacuum

Artigo Revisado por pares

GwangSeok Kim, Sang-Yul Lee, Junhee Hahn,

... of titanium aluminum nitride films synthesized by unbalanced magnetron sputtering (UBMS) and closed-field unbalanced magnetron sputtering (CFUBMS) were compared in this article. TiAlN ... various N2 partial pressures by two types of magnetron sputtering: (i) the single UBMS and (ii) CFUBMS with four magnetron sources. The deposition rate of TiAlN films produced by CFUBMS with four magnetron sources was increased up to approximately 1.35 ... that TiAlN films deposited by two types of magnetron sputtering have similar chemical composition and crystal structure ...

Tópico(s): GaN-based semiconductor devices and materials

2004 - Elsevier BV | Surface and Coatings Technology

Artigo Revisado por pares

Igor Svadkovski, Д. А. Голосов, Sergey M. Zavatskiy,

... one of the main directions of development of magnetron sputtering methods. In this paper comparative analysis of three configurations of the magnetron sputtering system has been made. The following parameters, ... serve as criteria for the estimation of unbalanced magnetron parameters have been developed: the unbalance coefficient (K) ... the relation between them is characterised by arranging magnetron parameters. Their dependence on the distribution of ion ... material and its dependence on the level of magnetron unbalance. It was determined that the unbalance coefficient ...

Tópico(s): Fusion materials and technologies

2002 - Elsevier BV | Vacuum

Artigo Revisado por pares

Jiangang Zhao, H. Yasuda,

... an anode equipped with magnetic enhancement, the anode magnetron cathodic polymerization can be effectively operated in low ... type plasma polymer can be formed. When two magnetrons are used against a cathode (substrate), the configurations of magnetic field employed in each magnetron become an important factor of the system. In one case [parallel magnetron (PM)], in which the identical magnetrons are used; magnetic field near the substrate (cathode) emanating from two magnetrons are parallel. In another case [opposite magnetron (OM)], ...

Tópico(s): Additive Manufacturing and 3D Printing Technologies

2000 - American Institute of Physics | Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Artigo Revisado por pares

I. Safi,

Problems associated with reactive magnetron sputtering from elemental (i.e. non-compound) targets have been successfully solved in this work. The elements of this achievement ... AC power in the floating mode, between two magnetrons, allowed the reactive sputtering process to be arc- ... the AC one (or the independently DC powered magnetrons method) permitted the composition of the produced films ... varying the magnitude of power applied to each magnetron. (iii) The use of very fast feedback methods ... films to be high. (iv) Sputtering from two magnetrons made the production of alloys or multi-element ...

Tópico(s): ZnO doping and properties

2000 - Elsevier BV | Surface and Coatings Technology

Artigo Revisado por pares

M. Zlatanović, R. Beloševac, A. Kunosić,

Three configurations of a magnetron sputter ion plating system were considered: the double magnetron open field configuration, single magnetron multipole open field configuration and single magnetron multipole closed field configuration. The (Ti,Al)N coating was deposited in the double magnetron system onto substrates oscillating in and out of high ionization degree plasma obtained by overlapping two magnetron discharges. A strong influence of plasma "density" on ... The experiments were also performed in two single magnetron systems in order to find approximately the region ...

Tópico(s): High-Temperature Coating Behaviors

1997 - Elsevier BV | Surface and Coatings Technology