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From Jerome Cammada, From Ian McDonald, From Charles Hargrove, By Our Labour Staff, From Seymour Hersh, From Tony Aldous Environment Reporter, By our Political Staff, By Henry Stanhope, Defence Correspondent, By a Staff Reporter, By Clifford Longley, From Anthony Smith, By Pearce Wright Science Correspondent, From John Chartres, By Pat Healy, By Philip Howard, From Our Correspondent, From Our Own Correspondent, From Our Special Correspondent, From Jerome Caminada, From Our Foreign Staff, Our Defence Correspondent, From Dan van der Vat, From Michael Leapman, From Michael Knipe, From Peter Hazelhurst, by Mary Wood, By Nature-Times News Service, by Rose Odle, Joan Woollcombe, By Michael Hatfield, Nirad Chaudhuri, PHS, DENIS PIRRIE, ANTOINETTE PIRRIE, DENIS MARRIAN, JOHN GORST., PIERS DIXON., P. S. GOURGEY., IAN CAMPBELL., David Wood, L. JOHN COLLINS, P. J. O'Mahony, EDWARD NOTTIDGE, MERIALL J. McPHERSON, DAVID CHESTERTON., A. LANDSBOROUGH THOMSON., RALPH IRWIN-BROWN., From Harry Golombek, F. E., By a Veterinary Correspondent, F. H. S., Mr. Dennis Farr, by Marghanita Laski, Stephen Vizinczey, William Mann, John Russell Taylor, From Peter Ryde, Golf Correspondent, From Brian Lewis, By U. A. Titley Rugby Correspondent, By Geoffrey Green, Football Correspondent, By Geoffrey Green, From St. John Donn-Byrne, By Jim Snow Northern Correspondent, By Our Northern Correspondent, By Our Newmarket Correspondent, Gerald Ely, By Christopher Marley Financial Editor, By Maurice Corina Industrial Editor, From Anthony Thomas, By Dennis Dwyer, By Kenneth Owen Technology Correspondent, From Peter Jay Economics Editor, By Margaret Stone, From Our US Economics Correspondent, By R. W. Shakespeare, By Gerald Ely Estates Correspondent, FINANCIAL EDITOR, Kenneth Owen, Gillian O'Connor, Innis Macbeath, R. W. Shakespeare, TAYLOR OF GRYEE, WILMA CAWDOR., Ralph Hawtrey, J. L. THORNE, ANTHONY THOMAS, Anthony Thomas, Edited by Robert Jones, Robert Jones, Richard Spiegelberg, by Peter Jay, Economics Editor, by Hugh Stephenson, by Lord Aldington, by C. M. Dansey, by Margaret Allen, by Hanah Achtenberg, by David Spanier, by Frank Vogl, by Alan McGregor, by Dr. Paul Catz, by Edward Mortimer, by Stephan E. Schattmann, by Berry Ritchie, Mining Editor, by Ian Morison, by John Earle, by Peter Mansfield, by Shintaro Sakata, by B. Berkoff,

... lessons from past, Bank gimmick, Expulsion of Mr Rudi Dutschke, Proudly British, ... victory over Fischer, The Times Crossword Puzzle No. 12,574, Judi ...

1970 - Gale Group | TDA

Artigo Revisado por pares

Hans Rudi Fischer, Herbert Gross,

Tópico(s): Mathematics and Applications

1964 - Springer Nature | Mathematische Annalen

Jornais Acesso aberto

By George Clark Political Staff, By Our Business News Staff, From Fred Emery, From Robert Fisk, From Ronald Kershaw, By Clive Borrell, By Marcel Berlins, From Fox Butterfield, By Christopher Warman Local Government Correspon dent, From Our Correspondent, From Trevor Fishlock, By a Staff Reporter, By Our Labour Correspondent, From Harry Golombek Chess Correspondent, By Marcel Berlins Legal Correspondent, Stephen Jessel, By Peter Hopkirk, From Charles Hargrove, By George Clark political Staff, From Our Own Correspondent, From David Cross, By Our Foreign Staff, Prudence Glynn, From Patrick Brogan, From David Bonavia, From Paul Martin, By John Woodcock Cricket Correspondent, By John Nicholls, By John Blunsden, By Michael Phillips Racing Correspondent, By Pamela Macgregor-Morris, By Andrew Porter, Paul Overy, William Mann, William Gaunt, Irving Wardle, Alan Blyth, Bernard Levin, PHS, Robert Fisk, Victor Zorza, Michael Meacher, GEORGE J. LEVY, , JOHN RAWSON., GEORGE BINNEY, , VERNON BOGDANOR., RUPERT BLISS, , ANDREW OPPENHEIMER, H. H. L. DICKSON, R. W. NORTON, , DOUGLAS JAY, TUFTON BEAMISH, JOAN E. CARTER, , SELBY WHITTINGHAM., CECIL GOULD., STRABOLGI., ANDREW FAULDS., PETER BROWN, , PENELOPE M. SIBBICK., DONALD W. BROOKS., MICHAEL TREE., GEORGE B. YOUNG, , DAVID NIVEN, , By Geraldine Norman Sale Room Correspondent, From Anthony Thomas, By Melvyn Westlake, By Business News Staff, By Our Financial Staff, By Malcolm Brown, By Maurice Corina Industrial Editor, By Our Mining Correspondent, By Guy Hawtin, Kenneth Owen, G. C. ATKINSON., JEFFREY COATES, M. J. LIPMAN., ASTRID BOYE, , BY THE FINANCIAL EDITOR, Eric Wigham, Andrew Wilson, Christopher Wilkins,

... the poverty line?, East Germans lift ban on Rudi Dutschke, US Army says it spied on Germans ... Woodward Albert Hall, Henry Moore-Complete Graphic Work Fischer Fine Art Gallery, South Bank Summer Music Queen ...

1973 - Gale Group | TDA

Artigo Revisado por pares

Hans Rudi Fischer,

Tópico(s): Eurasian Exchange Networks

1959 - Springer Nature | Mathematische Annalen

Jornais Acesso aberto

By Joel Henri, Charles Hargrove, From Fred Emery, By Our Foreign Staff, By Hugh Noyes Parliamentary Correspondent, By a Staff Reporter, By Paul Routledge, Labour Staff, From Our Correspondent, By George Clark Political Staff, By David Wood Political Editor, From A Special Correspondent, Our Oxford Correspondent, By John Roper Medical Reporter, By Peter Evans Home Affairs Correspondent, By Our Education Correspondent, By Basil Gingell Religious Affairs Correspondent, From a Staff Reporter, By Henry Stanhope Defence Correspondent, From Pat Healy Social Services Correspondent, By Our Labour Correspondent, Our Cardiff Correspondent, From Trevor Fishlock, From Peter Strafford, From Roger Berthoud, From Our Own Correspondent, Our Diplomatic Correspondent, From Paul Martin, From Dan Van Der Vat, From Dessa Trevisan, From Eric Marsden, From David Housego, From Walter Sullivan, From Joseph Novitski, From William Beecher, By Geoffrey Wansell, By Nature-Times News Service, Paul Oestreicher, David Bonavia, Michael Wolfers, A special correspondent, PHS, DENIS BROGAN, J. R. NIGHTINGALE, L. P. WILLCOCKS, RAY WRIGHT, T. D. KINGDOM, ROBERT EGERTON, G. W. PERCIVAL, RAY WYLIE, SUSAN RAVEN, K. H. WELLMAN., GODFREY MORLEY, DAVID NAPLEY, J. R. L. Posnansky, RICHARD BECKETT, PHILIP ASTERLEY JONES, CLIFFORD BREWER, S. AHMED, MALIK ASADUZZAMAN, H. M. GLASS., RAYMOND LISTER., JOHN E. BROWN, F. G. LOTT, P. J. BURVILLE, By Geraldine Keen Sale Room Correspondent, Mr. David Chesterman, Stanley Reynolds, Michael Wale, Joan Chissell, George Christie, Alan Blyth, Henry Raynor, Guy Brett, From John Woodcock Cricket Correspondent, By U. A. Titley, Rugby Correspondent, By Michael Phillips, Racing Correspondent, By Our Northern Correspondent, By Our Racing Correspondent, By Our Newmarket Correspondent, By Jim Snow Northern Racing Correspondent, by John Young, by R. J. V. Joyce, by R. F. Chapman, by Dr. Peter Haskell, Penny Hunter Symon, By Clifford Webb, By Michael Baily, From Frank Vogl, By Maurice Corina Industrial Editor, By Andrew Wilson, By Clive Callow, From Michael Hornsby, By John Armytage, by Our Special Correspondent, By Michael Baily Shipping Correspondent, By Ronald Kershaw, By Dennis Dwyer, Kenneth Owen, BY THE FINANCIAL EDITOR, David Jones, Frank Vogl, T. A. E. LAYBORN., ERIC D. CROFT, G. V. SEANOR, By Eric Wigham, Professor Edward L. Page, John Woodland,

... Be Pleased. Letters to the Editor: Official secrecy, Rudi Dutschke, Who bashed the pheasant?, Appointing solicitors as ...

1970 - Gale Group | TDA

Artigo Revisado por pares

Chase Cook, Hans Rudi Fischer,

Tópico(s): Advanced Thermodynamics and Statistical Mechanics

1965 - Springer Nature | Mathematische Annalen

Jornais Acesso aberto

By Michael Baily Shipping Correspondent, By David Wood Political Editor, From Dan van der Vat, From Geoffrey Wansell, From Roger Berthoud, By Alan Hamilton Labour Staff, Our Nottingham correspondent, From Our Correspondent, By Christopher Warman, By Our Social Services Correspondent, By Alex Hendry, By Hugh Noyes Parliamentary Correspondent, By Our Local Government Correspondent, By a Staff Reporter, By Clive Borrell, By Henry Stanhope Defence Correspondent, By Our Political Staff, By Our Agricultural Correspondent, By A Staff Reporter, By Peter Evans Home Affairs Correspondent, By Geraldine Keen Sale Room Correspondent, From Patrick Brogan, From Our Own Correspondent, Ian McDonald, From Richard Wigg, By Pearce Wright Science Correspondent, From David Bonavia, By Gabriel Ronay, By Peter Hill, By Our Northern Industrial Correspondent, By Business News Staff, By Andrew Goodrick-Clarke, From Alan McGregor, By Ian Morison, BY THE FINANCIAL EDITOR, By Anthony Rowley, By R. W. Shakespeare, M.S., EDITED BY MARGARET STONE, Margaret Stone, Halldora Blair, John Drummond, Lindsay Duncan, James Reston, Rex Bellamy, Tony Aldous, Michael Wolfers, PHS, Patricia Tisdall, CHARLES WHEELER, GAY TREGONING., GUY STAIR SAINTY, J. R. TOVELL, D. LANE, JOSEPH NEEDHAM., TERENCE MILLER, D. LLEWELLYN MORGAN, FRANCES WILKINSON, D. C. FITCH, STELIO HOURMOUZIOS, KEITH MOSSMAN, R. M. BIRCUMSHAW, EDWARD HOLLOWAY., C. J. Rumsey, FRANK S. MARSHALL, G. S. LESTER, H. C. McLAREN, DOROTHY WRIGHT, G. H. TEBBOTH., ALAN WEBSTER, W. J. RASBRIDGE, ANTHONY CRIPPS, B. A. GILLMAN, T. J. HOLLINGSWORTH., By Guthrie Moir, By Nature-Times News Service, From John Woodcock Cricket Correspondent, By Rex Bellamy Tennis Correspondent, By U. A. Titley Rugby Correspondent, By John Nicholls, From Michael Leapman, By Michael Phillips Racing Correspondent, By Our Racing Correspondent, By Our Northern Correspondent, By Peter Ryde Golf-Correspondent, By Jim Snow Northern Correspondent, John Snagge, David Wade, Clive Barnes, Alan Blyth, Joan Chissel, William Mann, Irving Wardle, Bevis Hillier, Harry Golombek, Roy Hay, Andrew Graham, Colin Maclnnes, Katie Stewart, Edward Mayer, Susan Lester, by A. P. Ryan, by Robert Leslie editor, Records and Recording, By John Borwick technical editor, by Douglas Brown, by Michael Freegard, by Desmond Browning, by Sylvia Margolis, by Patrick O'Leary,

... to the Editor: Church unity and the Pope, Rudi Dutschke, A tanker at anchor, Class sizes in ...

1970 - Gale Group | TDA

Artigo Revisado por pares

Herbert Gross, Hans Rudi Fischer,

Tópico(s): Matrix Theory and Algorithms

1965 - Springer Nature | Mathematische Annalen

Artigo Revisado por pares

Chase Cook, Hans Rudi Fischer,

Tópico(s): Topology Optimization in Engineering

1967 - Springer Nature | Mathematische Annalen

Artigo Revisado por pares

Chase Cook, Hans Rudi Fischer,

Tópico(s): Advanced Banach Space Theory

1967 - Springer Nature | Mathematische Annalen

Artigo Acesso aberto Revisado por pares

Hans Rudi Fischer, Floyd L. Williams,

We study the cohomology of differential complexes, which we shall call Dolbeault-Kostant complexes, defined by certain integrable sub-bundles F of the complex tangent bundle of a manifold M . When M has a complex or symplectic structure and F is chosen to be the bundle of anti-holomorphic tangent vectors or, respectively, a “polarization” then the corresponding complexes are, respectively, the Dolbeault complex and (under further conditions) a complex introduced by Kostant in the context of geometric ...

Tópico(s): Geometry and complex manifolds

1979 - American Mathematical Society | Transactions of the American Mathematical Society

Artigo

Heinz K. Stahl, Hans Rudi Fischer,

Tópico(s): Social and Demographic Issues in Germany

2013 - Nomos | Konfliktdynamik

Artigo Acesso aberto Revisado por pares

Hans Rudi Fischer,

Only a few short papers on probability and error theory by Peter Gustav Lejeune Dirichlet are printed in his Werke. However, during his Berlin period, Dirichlet quite frequently gave courses on probability theory or the method of least squares. Unpublished lecture notes reveal that he presented original methods, especially when deriving probabilistic limit theorems; e.g., the use of his discontinuity-factor. The following article discusses some central ideas in Dirichlet's printed papers and unpublished ...

Tópico(s): History and Theory of Mathematics

1994 - Elsevier BV | Historia Mathematica

Revisão Acesso aberto Revisado por pares

Yvette Meißner, T. Rudi, Rebecca Fischer‐Betz, Anja Strangfeld,

There is limited robust evidence on the course of pregnancy and its outcomes in women with psoriatic arthritis (PsA) on which to base recommendations for the management of these patients.The primary objective was to review available data on (I) disease activity during pregnancy and on (II) adverse pregnancy outcomes (APO) in women with PsA. Secondly, neonatal outcomes and treatment of the rheumatic disease were investigated.Systematic literature search within the databases Pubmed and Embase until 30 ...

Tópico(s): Reproductive System and Pregnancy

2021 - Elsevier BV | Seminars in Arthritis and Rheumatism

Artigo Revisado por pares

Jimmy Melskens, Marc Schouten, Rudi Santbergen, Marinus Fischer, Ravi Vasudevan, D.J. van der Vlies, Robin Quax, S.G.M. Heirman, Klaus Jäger, Valeria Demontis, Miro Zeman, Arno H. M. Smets,

A profound comprehension of the nanostructure of hydrogenated amorphous silicon (a-Si:H) and the defect states in this material is currently still lacking despite several decades of research on this topic. Investigating the nature of defects in a-Si:H devices is especially important in view of the poorly understood Staebler–Wronski effect (SWE). Therefore we present the latest insights into the gap states in the a-Si:H bandgap by manipulating these sub gap states in three different ways: via the application ...

Tópico(s): Silicon Nanostructures and Photoluminescence

2014 - Elsevier BV | Solar Energy Materials and Solar Cells

Artigo Revisado por pares

Hans Rudi Fischer,

Tópico(s): Linguistic Education and Pedagogy

1963 - Springer Nature | Mathematische Annalen

Artigo Revisado por pares

Hans Rudi Fischer, Herbert Gross,

Tópico(s): Matrix Theory and Algorithms

1965 - Springer Nature | Mathematische Annalen

Artigo Acesso aberto Revisado por pares

Hans Rudi Fischer, Jerry J. Jungster, Floyd L. Williams,

An explicit full solution to the heat equation on the two-sphere is given.

Tópico(s): Elasticity and Wave Propagation

1985 - Elsevier BV | Journal of Mathematical Analysis and Applications

Artigo Revisado por pares

Rudi Volti, Claude S. Fischer,

Tópico(s): American History and Culture

1994 - Johns Hopkins University Press | Technology and Culture

Artigo Acesso aberto Revisado por pares

Heinrich Fischer, Rudi Glockshuber,

A point mutant in the ATP-binding motif (GPPGVGK362T) of the ATP-dependent protease La from Escherichia coli was investigated in which the lysine at position 362 was replaced by an alanine. The catalytic efficiency of the K362A mutant is at least two orders of magnitude lower than that of wild-type protease La due to a decreased Vmax and an increased KM for ATP. Simultaneously, the peptidase activity of La K362A is almost completely eliminated. Since selective inactivation of the peptidase activity ...

Tópico(s): Bacterial Genetics and Biotechnology

1994 - Wiley | FEBS Letters

Artigo Acesso aberto Revisado por pares

Heinrich Fischer, Rudi Glockshuber,

Protein degradation in Escherichia coli involves the ATP-dependent serine protease La. Protease La is a homotetramer with one proteolytic and one ATP binding site per monomer. Its proteolytic activity has been shown to be highly increased by simultaneous hydrolysis of ATP, which is essential for the degradation of protein substrates by this enzyme. We have cloned and purified a proteolytically inactive La mutant, in which the catalytically active serine residue at position 679 was replaced by alanine. ...

Tópico(s): Bacterial Genetics and Biotechnology

1993 - Elsevier BV | Journal of Biological Chemistry

Artigo Acesso aberto Revisado por pares

Ulrike Teichmann, Luc van Dyck, Bernard Guiard, Heinrich Fischer, Rudi Glockshuber, Walter Neupert, Thomas Langer,

PIM1 protease in mitochondria belongs to a conserved family of ATP-dependent proteases, which includes the Escherichia coli Lon protease. Yeast cells lacking PIM1 are largely defective in degrading misfolded proteins in the mitochondrial matrix, are respiratory deficient, and lose integrity of mitochondrial DNA. In order to analyze whether E. coli Lon protease is functionally equivalent to mitochondrial PIM1 protease, yeast cells lacking the PIM1 gene were transformed with a construct consisting ...

Tópico(s): Signaling Pathways in Disease

1996 - Elsevier BV | Journal of Biological Chemistry

Artigo Acesso aberto Revisado por pares

David Capper, David Jones, Martin Sill, Volker Hovestadt, Daniel Schrimpf, Dominik Sturm, Christian Koelsche, Felix Sahm, Lukas Chávez, David Reuß, Annekathrin Kratz, Annika K. Wefers, Kristin Huang, Kristian W. Pajtler, Leonille Schweizer, Damian Stichel, Adriana Olar, Nils W. Engel, Kerstin Lindenberg, Patrick N. Harter, Anne K. Braczynski, Karl H. Plate, Hildegard Dohmen, Boyan K. Garvalov, Roland Coras, Annett Hölsken, Ekkehard Hewer, Melanie Bewerunge‐Hudler, Matthias Schick, Roger Fischer, Rudi Beschorner, Jens Schittenhelm, Ori Staszewski, Khalida Wani, Pascale Varlet, Mélanie Pagès, Petra Temming, Dietmar Lohmann, Florian Selt, Hendrik Witt, Till Milde, Olaf Witt, Eleonora Aronica, Felice Giangaspero, Elisabeth J. Rushing, Wolfram Scheurlen, Christoph Geisenberger, Fausto J. Rodríguez, Albert J. Becker, Matthias Preusser, Christine Haberler, Rolf Bjerkvig, Jane Cryan, Michael A. Farrell, Martina Deckert, Jürgen Hench, Stephan Frank, Jonathan Serrano, Kasthuri Kannan, Aristotelis Tsirigos, Wolfgang Brück, Silvia Höfer, Stefanie Brehmer, Marcel Seiz‐Rosenhagen, Daniel Hänggi, Volkmar Hans, Stephanie Rozsnoki, Jordan R. Hansford, Patricia Kohlhof, Bjarne Winther Kristensen, Matt Lechner, Beatriz Lopes, Christian Mawrin, Ralf Ketter, Andreas E. Kulozik, Ziad Khatib, Frank L. Heppner, Arend Koch, Anne Jouvet, Catherine Keohane, Helmut Mühleisen, Wolf Mueller, Ute Pohl, Marco Prinz, Axel Benner, Marc Zapatka, Nicholas G. Gottardo, Pablo Hernáiz Driever, Christof M. Kramm, Hermann L. Müller, Stefan Rutkowski, Katja von Hoff, Michael C. Frühwald, Astrid Gnekow, Gudrun Fleischhack, Stephan Tippelt, Gabriele Calaminus, Camelia‐Maria Monoranu, Arie Perry, Chris Jones, Thomas S. Jacques, Bernhard Radlwimmer, Marco Gessi, Torsten Pietsch, Johannes Schramm, Gabriele Schackert, Manfred Westphal, Guido Reifenberger, Pieter Wesseling, Michael Weller, V. Peter Collins, Ingmar Blümcke, Martin Bendszus, Jürgen Debus, Annie Huang, Nada Jabado, Paul A. Northcott, Werner Paulus, Amar Gajjar, Giles Robinson, Michael D. Taylor, Zane Jaunmuktane, Marina Ryzhova, Michael Platten, Andreas Unterberg, Wolfgang Wick, Matthias A. Karajannis, Michel Mittelbronn, Till Acker, Christian Hartmann, Kenneth Aldape, Ulrich Schüller, Rolf Buslei, Peter Lichter, Marcel Kool, Christel Herold‐Mende, David W. Ellison, Martin Hasselblatt, Matija Snuderl, Sebastian Brandner, Andrey Korshunov, Andreas von Deimling, Stefan M. Pfister,

Accurate pathological diagnosis is crucial for optimal management of patients with cancer. For the approximately 100 known tumour types of the central nervous system, standardization of the diagnostic process has been shown to be particularly challenging-with substantial inter-observer variability in the histopathological diagnosis of many tumour types. Here we present a comprehensive approach for the DNA methylation-based classification of central nervous system tumours across all entities and ...

Tópico(s): Epigenetics and DNA Methylation

2018 - Nature Portfolio | Nature

Artigo Acesso aberto Revisado por pares

Hans Rudi Fischer, Jerry J. Jungster, Floyd L. Williams,

Tópico(s): advanced mathematical theories

1984 - Elsevier BV | Advances in Mathematics

Artigo Acesso aberto Revisado por pares

Hans Rudi Fischer, Floyd L. Williams,

We compute the .E^-term of Borel's spectral sequence for certain holomorphic fibrations.Among some of the applications considered are the representation of automorphic cohomology of a flag domain, and the derivation of new cohomology vanishing theorems for certain compact projective varieties.

Tópico(s): Homotopy and Cohomology in Algebraic Topology

1984 - Tohoku University | Tohoku Mathematical Journal

Artigo

Hans Rudi Fischer, Heinz K. Stahl,

Tópico(s): Psychology, Coaching, and Therapy

2014 - Nomos | Konfliktdynamik

Artigo

Tópico(s): Organizational Learning and Leadership

2020 - Nomos | Konfliktdynamik

Artigo Revisado por pares

K. J. Schneider, Anton Neubrand, Rudi van Eldik, Henry E. Fischer,

ADVERTISEMENT RETURN TO ISSUEPREVArticleNEXTEffect of pressure on the insertion kinetics of metal-carbene complexesK. J. Schneider, A. Neubrand, R. Van Eldik, and H. FischerCite this: Organometallics 1992, 11, 1, 267–269Publication Date (Print):January 1, 1992Publication History Published online1 May 2002Published inissue 1 January 1992https://pubs.acs.org/doi/10.1021/om00037a048https://doi.org/10.1021/om00037a048research-articleACS PublicationsRequest reuse permissionsArticle Views35Altmetric-Citations12LEARN ...

Tópico(s): Microfluidic and Capillary Electrophoresis Applications

1992 - American Chemical Society | Organometallics

Artigo Revisado por pares

Elisabeth Mohorko, Helge K. Abicht, Doris Bühler, Rudi Glockshuber, Hauke Hennecke, Hans‐Martin Fischer,

ScoI and TlpA bind by cross‐linking study (View Interaction: 1, 2)

Tópico(s): Metalloenzymes and iron-sulfur proteins

2012 - Wiley | FEBS Letters

Artigo Acesso aberto

P. M. Zagwijn, Wilco Verweij, Dieter Pierreux, Noureddine Adjeroud, R.G. Bankras, Ed Oosterlaken, Gert Jan Snijders, Michiel Van den Hout, Pamela R. Fischer, Rudi Wilhelm, Martin Knapp,

This article describes a novel CVD process for TiN films developed in a 300 mm Vertical Furnace. We have solved Chlorine incorporation at low temperature inside the TiN layer while at the same time the batch process yields a 3 times higher throughput per dual reactor system compared to a single wafer system with 3 chambers.We show process results for load sizes ranging from 5 to as much as 100 wafers that prove filler wafers are only required to a minimum. Applications of the developed TiN process ...

Tópico(s): Copper Interconnects and Reliability

2008 - Institute of Physics | ECS Transactions