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Large-Area Synthesis of High-Quality Uniform Few-Layer MoTe 2

2015; American Chemical Society; Volume: 137; Issue: 37 Linguagem: Inglês

10.1021/jacs.5b07452

1943-2984

Lin Zhou, Kai Xu, Ahmad Zubair, Albert Liao, Wenjing Fang, Fangping Ouyang, Yi‐Hsien Lee, Keiji Ueno, Riichiro Saito, Tomás Palacios, Jing Kong, M. S. Dresselhaus,

Perovskite Materials and Applications

The controlled synthesis of large-area, atomically thin molybdenum ditelluride (MoTe2) crystals is crucial for its various applications based on the attractive properties of this emerging material. In this work, we developed a chemical vapor deposition synthesis to produce large-area, uniform, and highly crystalline few-layer 2H and 1T' MoTe2 films. It was found that these two different phases of MoTe2 can be grown depending on the choice of Mo precursor. Because of the highly crystalline structure, the as-grown few-layer 2H MoTe2 films display electronic properties that are comparable to those of mechanically exfoliated MoTe2 flakes. Our growth method paves the way for the large-scale application of MoTe2 in high-performance nanoelectronics and optoelectronics.