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Reactions between Metal Atoms and Gases during the Production of Thin Films in High Vacuum

1975; Wiley; Volume: 14; Issue: 4 Linguagem: Inglês

10.1002/anie.197502071

1521-3773

Max Auwärter,

Catalytic Processes in Materials Science

Angewandte Chemie International Edition in EnglishVolume 14, Issue 4 p. 207-211 Review Reactions between Metal Atoms and Gases during the Production of Thin Films in High Vacuum† Prof. Dr. Max Auwärter, Corresponding Author Prof. Dr. Max Auwärter Balzers Aktiengesellschaft für Hochvakuumtechnik und Düne Schichten FL-9496 Balzers (Liechtenstein)Balzers Aktiengesellschaft für Hochvakuumtechnik und Düne Schichten FL-9496 Balzers (Liechtenstein)Search for more papers by this author Prof. Dr. Max Auwärter, Corresponding Author Prof. Dr. Max Auwärter Balzers Aktiengesellschaft für Hochvakuumtechnik und Düne Schichten FL-9496 Balzers (Liechtenstein)Balzers Aktiengesellschaft für Hochvakuumtechnik und Düne Schichten FL-9496 Balzers (Liechtenstein)Search for more papers by this author First published: April 1975 https://doi.org/10.1002/anie.197502071Citations: 8 † Based on a lecture delivered at the symposium “Metal Atoms in Chemical Synthesis” held under the auspices of the Merck'sche Gesellschaft für Kunst und Wissenschaft e. V. at Darmstadt (May 12–15, 1974). AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Citing Literature Volume14, Issue4April 1975Pages 207-211 RelatedInformation