Metrology and High Resolution Mapping of Shallow Junctions Formed by Low Energy Implant Processes
2006; American Institute of Physics; Linguagem: Inglês
10.1063/1.2401573
ISSN1935-0465
AutoresEric Don, A. Pap, P. Tüttő, T. Pavelka, Christophe Wyon, C. Laviron, D. Sotta, R. Oechsner, Marcus Pfeffer,
Tópico(s)Bone Tissue Engineering Materials
ResumoViews Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Eric Don, Aron Pap, Peter Tutto, Tibor Pavelka, Christophe Wyon, Cyrille Laviron, David Sotta, Richard Oechsner, Marcus Pfeffer; Metrology and High Resolution Mapping of Shallow Junctions Formed by Low Energy Implant Processes. AIP Conf. Proc. 13 November 2006; 866 (1): 534–537. https://doi.org/10.1063/1.2401573 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAIP Publishing PortfolioAIP Conference Proceedings Search Advanced Search |Citation Search
Referência(s)