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Comparison of the Gas Sensing Properties of Thin Film SnO[sub 2] Produced by RGTO and Pore Wetting Technique

2009; American Institute of Physics; Linguagem: Inglês

10.1063/1.3156553

1935-0465

D.F. Rodríguez, Bruce A. Lerner, Maximiliano Pérez, F. Ibañez, A.G. Leyva, Juan Bonaparte, Carlos A. Rinaldi, A. Boselli, A. Lamagna, Matteo Pardo, Giorgio Sberveglieri,

Advanced Chemical Sensor Technologies

Two different techniques were used for manufacturing thin films of SnO2: RGTO [1] and pore wetting [2–4]. From the first one, a microstructure formed by nanograins obtained and from the second, a microstructure consisting of nanotubes. These would permit understand the relationship between the microstructure and the electrical response of the thin film. The film of SnO2 nanotubes shows good sensitivity to volatile gases and an unusual sensitivity even at room temperature.