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Silicon nanopillar arrays with SiO_2 overlayer for biosensing application

2014; Optica Publishing Group; Volume: 4; Issue: 7 Linguagem: Inglês

10.1364/ome.4.001345

2159-3930

Bikash Dev Choudhury, Rafael Casquel, María‐José Bañuls, Francisco J. Sanza, María Fe Laguna Heras, Miguel Holgado, Rosa Puchades, Ángel Maquieira, Carlos Angulo Barrios, S. Anand,

Photonic Crystals and Applications

We present the fabrication of silicon dioxide (SiO 2 ) coated silicon nanopillar array structures and demonstrate their application as sensitive optical biosensors.Colloidal lithography, plasma dry etching and deposition processes are used to fabricate SiO 2 coated Si nanopillar arrays with two different diameters and periods.Proof of concept bio recognition experiments are carried out with the bovine serum albumin (BSA)/antiBSA model system using Fourier transform visible and IR spectrometry (FT-VIS-IR) in reflection mode.A limit of detection (LoD) value of 5.2 ng/ml is estimated taking in to account the wavenumber uncertainty in the measurements.