Structural analysis of hydrogenated carbon films obtained by reactive direct current magnetron sputtering
1996; American Institute of Physics; Volume: 14; Issue: 1 Linguagem: Inglês
10.1116/1.579917
ISSN1520-8559
AutoresShigehiko Fujimaki, Hiroshi Matsumoto, Y. Kokaku, Makoto Kitoh, N. Tsumita,
Tópico(s)Metal and Thin Film Mechanics
ResumoAmorphous hydrogenated carbon films were prepared by reactive direct current magnetron sputtering in argon plasma containing methane as the reactant gas. The films were characterized using various spectroscopic measurements such as Raman scattering, optical absorption spectroscopy in the ultraviolet–visible region, and infrared (IR) absorption spectroscopy. The spectral analyses indicated that changes in Raman spectroscopy intensity occurring with increasing methane gas content were determined to be caused by changes in optically resonant components in the films. Furthermore, a significant correlation was seen between the relative intensity of IR peaks and wear durability.
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