Angular-interrogation attenuated total reflection metrology system for plasmonic sensors
2005; Optica Publishing Group; Volume: 44; Issue: 29 Linguagem: Inglês
10.1364/ao.44.006155
ISSN0003-6935
AutoresJenq‐Nan Yih, Fan‐Ching Chien, C.-Y. Lin, Hon-Fai Yau, Shean-Jen Chen,
Tópico(s)Photonic and Optical Devices
ResumoWe develop an angular-interrogation attenuated total reflection (ATR) metrology system for three different plasmonic sensors, namely, a conventional surface plasmon resonance (SPR) device, a coupled-waveguide SPR device, and a nanoparticle-enhanced SPR device. The proposed metrology system is capable of measuring the reflectivity spectra of the transverse magnetic mode and the transverse electric mode simultaneously. Through the optimal control of the fabrication process and use of sophisticated system instrumentation, the experimental results confirm that the developed ATR system is capable of measuring the resonant angle with an angular accuracy of 10(-4) deg.
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