Development of an atmospheric-pressure homogeneous and cold Ar/O2 plasma source operating in glow discharge
2010; American Institute of Physics; Volume: 17; Issue: 6 Linguagem: Inglês
10.1063/1.3447877
ISSN1527-2419
AutoresShou‐Zhe Li, Qi Wu, Jialiang Zhang, Dezhen Wang, Han S. Uhm,
Tópico(s)Plasma Diagnostics and Applications
ResumoAn atmospheric-pressure Ar/O2 glow discharge is generated in a parallel bare metal plate reactor with a radio-frequency power supply by introducing a dielectric strip in the inlet of the gas flow. The role of the dielectric strip is discussed experimentally. The allowable oxygen-to-argon ratio reaches 1.0 vol % and the generated Ar/O2 plasma discharge is characterized by a low gas temperature and good spatial homogeneity, implying its feasible application as a type of material treatment for a large-area surface, as illustrated experimentally by the ashing of carbon black.
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