A ZnO nanowire-based humidity sensor

2010; Elsevier BV; Volume: 47; Issue: 6 Linguagem: Inglês

10.1016/j.spmi.2010.03.006

ISSN

1096-3677

Autores

Sheng-Po Chang, Shoou‐Jinn Chang, Chien-Yuan Lu, Meng‐Ju Li, Cheng‐Liang Hsu, Yu-Zung Chiou, Ting‐Jen Hsueh, I‐Cherng Chen,

Tópico(s)

Analytical Chemistry and Sensors

Resumo

In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current–voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×105, 4.3×105, 3.7×105 and 3.2×105Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.

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