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Selective detection of emission lines from sputtered particles in glow discharge plasma with a modulated hollow cathode lamp

1988; Elsevier BV; Volume: 43; Issue: 6-7 Linguagem: Inglês

10.1016/0584-8547(88)80116-2

1873-3565

Kazuaki Wagatsuma, Kichinosuke Hirokawa,

Plasma Applications and Diagnostics

A modulated hollow cathode lamp which consists of three electrodes is investigated and discussed. A discharge operating power supplied between the intermediate electrode and the anode generates the hollow cathode plasma in the intermediate electrode with a pulsed discharge mode. The number of sample atoms sputtered from the cathode surface is controlled with a bias voltage supplied between the cathode (sample) and the intermediate electrode. Emission intensities from the sputtered particles strongly depend on the variation in the bias voltage, whereas those from gas species hardly change. It is suggested from this effect that the emission lines of the sample atoms are selectively detected from the total emission signals.