Two-Wavelength Multi-Gigahertz Frequency Comb-Based Interferometry for Full-Field Profilometry
2013; Institute of Physics; Volume: 6; Issue: 10 Linguagem: Inglês
10.7567/apex.6.106601
ISSN1882-0786
AutoresSamuel Choi, Ken Kashiwagi, Shuto Kojima, Yosuke Kasuya, Takashi Kurokawa,
Tópico(s)Optical measurement and interference techniques
ResumoThe multi-gigahertz frequency comb-based interferometer exhibits only the interference amplitude peak without the phase fringes, which can produce a rapid axial scan for full-field profilometry and tomography. Despite huge technical advantages, there remain problems that the interference intensity undulations occurred depending on the interference phase. To avoid such problems, we propose a compensation technique of the interference signals using two frequency combs with slightly varied center wavelengths. The compensated full-field surface profile measurements of cover glass and onion skin were demonstrated experimentally to verify the advantages of the proposed method.
Referência(s)