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Improved magnetic behaviour of cobalt-based-alloy sputter-target material

1991; Elsevier BV; Volume: 139; Linguagem: Inglês

10.1016/0921-5093(91)90642-z

1873-4936

M Weigert, S.U. Schittny, B.L. Gehman,

Fusion materials and technologies

The influence of different grain structures of cobalt alloy sputter targets was examined in terms of magnetic permeability and target utilization. For hexagonal cobalt alloys the best magnetic behaviour can be achieved by a special grain orientation (texture) of the sputter targets, so that the weak magnetic directions are mainly oriented perpendicular to the target surface. Magnetic measurements above the target surface and test sputtering of targets produced by different production techniques demonstrate the possibility of using thicker sputter targets and of higher target utilization, when texture-treated target material is used.