Performance of the bent beam ionization gauge in ultrahigh vacuum measurements
1988; Elsevier BV; Volume: 38; Issue: 12 Linguagem: Inglês
10.1016/0042-207x(88)90003-6
ISSN1879-2715
AutoresW. Jitschin, P. Röhl, G. Grosse, S-W Han,
Tópico(s)Plasma Diagnostics and Applications
ResumoThe characteristics of a commercial bent beam ionization gauge have been investigated. The dependencies of ion collector current on electron emission current, electron energy and deflector field strength are reported; the ionization gauge coefficient varies significantly with emission current. The lower limit of pressure measurements is restricted by two effects, i.e. the X-ray limit which is < 4 × 10−11 Pa and the filament evaporation limit which amounts to ∼ 6 × 10−11 Pa nitrogen equivalent pressure at the recommended operating conditions. The filament evaporation can be reduced by operating the gauge at a smaller emission current. Thereby the gauge becomes suitable for measurements of vacuum pressures in the 10−11 Pa range.
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