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Electromechanical resonator in scanning microdeformation microscopy: theory and experiment

1999; Wiley; Volume: 27; Issue: 5-6 Linguagem: Inglês

10.1002/(sici)1096-9918(199905/06)27

1096-9918

Pascal Vairac, B. Cretin,

Advanced MEMS and NEMS Technologies

Surface and Interface AnalysisVolume 27, Issue 5-6 p. 588-591 Research Article Electromechanical resonator in scanning microdeformation microscopy: theory and experiment P. Vairac, P. Vairac Laboratoire Physique et Métrologie des Oscillateurs du CNRS, Associé à l'Université de Franche-Comté-Besançon, Institut des Microtechniques de Franche-Comté, 32 Avenue de l'Observatoire, 25044 Besançon Cedex, FranceSearch for more papers by this authorB. Cretin, Corresponding Author B. Cretin [email protected] Laboratoire Physique et Métrologie des Oscillateurs du CNRS, Associé à l'Université de Franche-Comté-Besançon, Institut des Microtechniques de Franche-Comté, 32 Avenue de l'Observatoire, 25044 Besançon Cedex, FranceLaboratoire Physique et Métrologie des Oscillateurs du CNRS, Associé à l'Université de Franche-Comté-Besançon, Institut des Microtechniques de Franche-Comté, 32 Avenue de l'Observatoire, 25044 Besançon Cedex, FranceSearch for more papers by this author P. Vairac, P. Vairac Laboratoire Physique et Métrologie des Oscillateurs du CNRS, Associé à l'Université de Franche-Comté-Besançon, Institut des Microtechniques de Franche-Comté, 32 Avenue de l'Observatoire, 25044 Besançon Cedex, FranceSearch for more papers by this authorB. Cretin, Corresponding Author B. Cretin [email protected] Laboratoire Physique et Métrologie des Oscillateurs du CNRS, Associé à l'Université de Franche-Comté-Besançon, Institut des Microtechniques de Franche-Comté, 32 Avenue de l'Observatoire, 25044 Besançon Cedex, FranceLaboratoire Physique et Métrologie des Oscillateurs du CNRS, Associé à l'Université de Franche-Comté-Besançon, Institut des Microtechniques de Franche-Comté, 32 Avenue de l'Observatoire, 25044 Besançon Cedex, FranceSearch for more papers by this author First published: 20 May 1999 https://doi.org/10.1002/(SICI)1096-9918(199905/06)27:5/6 3.0.CO;2-XCitations: 15AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinkedInRedditWechat Abstract We have studied, both theoretically and experimentally, the dynamic behaviour of an electromechanical resonator, which is the probe head of our scanning microdeformation microscope (SMM). The SMM is a form of contact a.c. force microscope using a tip mounted at the end of a silicon cantilever, which vibrates in contact with the sample. A new model, which takes into account the normal and tangential stiffness of the tip–sample contact, but also the geometry of the tip, is proposed. Experimental investigations into the vibration shapes of the cantilever performed with a highly sensitive optical probe confirm the realistic behaviour of our model. The fitted theoretical results are in good agreement with experiments. Associated with this model, scanning microdeformation microscopy seems an attractive technique for the quantitative measurement of local material properties. Copyright © 1999 John Wiley & Sons, Ltd. Citing Literature Volume27, Issue5-6Special Issue: Papers Presented at the SXM‐3 ConferenceMay ‐ June 1999Pages 588-591 RelatedInformation