Microtechnology for fabrication of surface micromechanic devices based on a novel SiC-AlN composition
1999; SPIE; Volume: 3680; Linguagem: Inglês
10.1117/12.341156
ISSN1996-756X
AutoresВ. В. Лучинин, Andrey V. Korlyakov, Givi I. Jandjgava, Stanislav V. Prosorov, Aleksander K. Solomatin, Anatoley V. Sorokin, Sergey G. Kucherkov, Л. А. Северов, Valeriy K. Ponomarev,
Tópico(s)Advanced Surface Polishing Techniques
ResumoSelection of candidate materials and processes for manufacturing structural members is of great moment in designing surface micromechanics devices. The known arts of obtaining superficial microstructures, as a rule, with the use of a 'sacrificial' layer were based on the employment of polysilicon as a working material and of silicon dioxide as a removable 'sacrificial' underlayer. This paper proposed an art for obtaining a novel structure forming the basis for surface micromechanics. Thereby monocrystalline silicon carbide is to be epitaxially grown over a compound substrate, such as AlN-Si, AlN-Al 2 O 3 or AlN-SiC. A film of aluminium nitride serves then as an orientation base for epitaxially-grown silicon carbide and also as a 'sacrificial' layer to be stripped away by an etchant which must be non-reactive both to SiC and to substrate material. The crystallochemical computability of SiC and AlN, their matching thermal expansion coefficients, and high mechanical properties of silicon carbide favor a stress decrease in movable loaded members of surface micromechanics devices, just increasing those performance stability. The paper will present some experimental results that have been obtained in designing a process for manufacturing a rotating wheel vibratory microgyroscope with a moveable SiC pendulum using a SiC-AlN composition as the base.
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