Study of hydrogen in DLC film by ERDA with 58Ni ions
1995; Elsevier BV; Volume: 46; Issue: 7 Linguagem: Inglês
10.1016/0042-207x(95)00004-6
ISSN1879-2715
AutoresD.K. Avasthi, D. Kabiraj, Jaipal, Geeta Mehta, Harish C. Barshilia, Somna Sah, B. R. Mehta, V. D. Vankar,
Tópico(s)Force Microscopy Techniques and Applications
ResumoThe content of hydrogen and its depth profile in diamond like carbon (DLC) films deposited by the microwave plasma deposition technique is determined by Elastic Recoil Detection Analysis (ERDA) using 85 MeV 58Ni ions. Simultaneous detection of hydrogen and carbon recoils provided a method to determine the relative number of hydrogen: carbon atoms without using a standard H sample for quantitative calibration.
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