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LSS and the Integral Equations of Transport Theory

1983; IOP Publishing; Volume: 28; Issue: 3 Linguagem: Inglês

10.1088/0031-8949/28/3/001

1402-4896

Peter Sigmund,

Silicon and Solar Cell Technologies

A brief historical survey is given of the status of ion implantation around 1960. The new features added to the field by the LSS theory are discussed explicitly, and further developments and applications are described briefly. The paper concludes with a few remarks on possible future developments.