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EELS elemental mapping of a DRAM with FE-TEM

1998; Oxford University Press; Volume: 47; Issue: 5 Linguagem: Inglês

10.1093/oxfordjournals.jmicro.a023619

1477-9986

Masahiro Kawasaki, Tetsuo Oikawa, K. Ibe, K.-h. Park, Makoto Shiojiri,

Anodic Oxide Films and Nanostructures

Journal Article EELS elemental mapping of a DRAM with FE-TEM Get access Masahiro Kawasaki, Masahiro Kawasaki * 1JEOL Ltd.Tokyo 196-8558, Japan *To whom correspondence should be addressed. E-mail: kawasaki@jeol.co.jp Search for other works by this author on: Oxford Academic PubMed Google Scholar Tetsuo Oikawa, Tetsuo Oikawa 1JEOL Ltd.Tokyo 196-8558, Japan Search for other works by this author on: Oxford Academic PubMed Google Scholar Katsuhiko Ibe, Katsuhiko Ibe 1JEOL Ltd.Tokyo 196-8558, Japan Search for other works by this author on: Oxford Academic PubMed Google Scholar Kyung-ho Park, Kyung-ho Park 2Texas Instruments Inc.13570 North Central Expressway, MS3740, Dallas, TX 75243, USA Search for other works by this author on: Oxford Academic PubMed Google Scholar Makoto Shiojiri Makoto Shiojiri 3Kyoto Institute of TechnologyMatsugasaki, Sakyo-ku, Kyoto 606-8585, Japan Search for other works by this author on: Oxford Academic PubMed Google Scholar Journal of Electron Microscopy, Volume 47, Issue 5, 1998, Pages 477–488, https://doi.org/10.1093/oxfordjournals.jmicro.a023619 Published: 01 January 1998 Article history Published: 01 January 1998 Received: 26 March 1998 Accepted: 16 July 1998