Revised formulae for sputtering data
1995; Elsevier BV; Volume: 218; Issue: 1 Linguagem: Inglês
10.1016/0022-3115(94)00376-9
ISSN1873-4820
AutoresC. García–Rosales, W. Eckstein, J. Roth,
Tópico(s)Nuclear Materials and Properties
ResumoA revision and improvement of analytic formulae for calculating sputtering yields is performed based on the large number of experimental and calculated sputtering yield data accumulated at IPP in the last three decades. The Bohdansky formula for calculating sputtering yields as a function of energy is revised by introducing a nuclear stopping cross-section based on an analytic fit to the KrC potential. New analytic expressions for the two fit parameters Q and Eth of the Bohdansky formula are deduced. Yamamura's formula for the angular dependence of the sputtering yield is shown not to be valid for self-sputtering and for heavy projectiles at energies near the threshold.
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