Elastic constants and hardness of ion-beam-sputtered TiN x films measured by Brillouin scattering and depth-sensing indentation
1991; American Institute of Physics; Volume: 69; Issue: 5 Linguagem: Inglês
10.1063/1.348963
ISSN1520-8850
AutoresXin Jiang, M. Wang, K. Schmidt, Ewan D. Dunlop, J. Haupt, W. Gissler,
Tópico(s)Adhesion, Friction, and Surface Interactions
ResumoTiNx films of various composition have been prepared by reactive-ion-beam sputtering at a deposition temperature of 50 °C. Young’s modulus E and hardness H of these films were measured by a depth-sensing nanoindentation technique, whereas the shear modulus G was obtained by a measurement of the velocity of the acoustic surface wave by Brillouin light scattering. The study was extended over a wide range of stoichiometries, 0≤x≤0.8. A proportionality between E and H has been observed.
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