Ultraprecision Surface Grinding of Chemical Vapor Deposited Silicon Carbide for X-Ray Mirrors Using Resinoid-Bonded Diamond Wheels
1999; Elsevier BV; Volume: 48; Issue: 1 Linguagem: Inglês
10.1016/s0007-8506(07)63183-7
ISSN1726-0604
AutoresYoshiharu Namba, Hiroto Kobayashi, Hirofumi Suzuki, K. Yamashita, Nobuhiko Taniguchi,
Tópico(s)Laser Material Processing Techniques
ResumoChemical Vapor Deposited Silicon Carbide (CVD-SiC) on sintered silicon carbide has been ground by the ultraprecision surface grinder having a glass-ceramic spindle of extremely-low thermal expansion with various cup-type resinoid-bonded diamond wheels for getting high-brightness synchrotron radiation mirrors. The surface roughness depends upon the average grain size of a wheel, feed per wheel revolution and degree of cutting edge wear. A very smooth surface of 0.266nm rms was obtained by ultraprecision grinding without polishing. A high specular reflectivity of 88.7% at 0.834nm in wavelength was obtained on the ground surface at the grazing incident angle of 0.7–0.95 degree, parallel to the grinding direction.
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