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Mechanical properties and oxidation behaviour of (Al,Cr)N and (Al,Cr,Si)N coatings for cutting tools deposited by HPPMS

2008; Elsevier BV; Volume: 517; Issue: 3 Linguagem: Inglês

10.1016/j.tsf.2008.06.050

1879-2731

Kirsten Bobzin, Nazlim Bagcivan, Philipp Immich, S. Bolz, R. Cremer, T. Leyendecker,

Semiconductor materials and devices

Hard coatings with high hardness, high oxidation resistance and thermal stability are used for economical machining. In this regard nanostructured (Cr,Al)N and nc-(Cr,Al)N/a-Si3N4 films were sputtered on tungsten carbide tools and WC/Co samples by using the HPPMS (High Power Pulse Magnetron Sputtering) technology. The relationship between coating composition, microstructure and mechanical properties was investigated by using X-ray diffraction, Scanning Electron Microscopy (SEM), and Nanoindentation. The maximum hardness value was about 40 GPa. For the coatings the Al-content was varied from 10–90 at.% while the silicon content was about 5 at.% for the (Cr,Al,Si)N. As this study focuses on oxidation behaviour of the deposited coatings, annealing tests were carried out in air at 1000 °C. HPPMS is a promising technology to ensure a uniform coating distribution, especially for complex shaped substrates like cutting tools or moulds. SEM pictures of the cross section have been taken around the cutting edge to determine the deposition rate and the film growth. The coatings morphology has been compared to m. f. (middle frequency)- and d. c. (direct current)-sputtered nanocomposite (Cr,Al,Si)N films indicating enhanced properties due to the application of the HPPMS-technology with regard to denser structure, higher hardness, favourable surface topography and better thickness uniformity.