Modular bimorph mirrors for adaptive optics
2009; SPIE; Volume: 48; Issue: 3 Linguagem: Inglês
10.1117/1.3099716
ISSN1560-2303
AutoresGonçalo Rodrigues, Renaud Bastaits, Stéphane Roose, Yvan Stockman, W. Gebhardt, Andreas Schoenecker, Pierre Villon, André Preumont,
Tópico(s)Optical Coatings and Gratings
ResumoThis paper examines the possibility of constructing deformable mirrors for adaptive optics with a large number of degrees of freedom from silicon wafers with bimorph piezoelectric actuation. The mirror may be used on its own, or as a segment of a larger mirror. The typical size of one segment is 100 to 200 mm; the production process relies on silicon wafers and thick film piezoelectric material deposition technology; it is able to lead to an actuation pitch of the order of 5 mm, and the manufacturing costs appear to grow only slowly with the number of degrees of freedom in the adaptive optics.
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