Fabrication of Mg-doped ZnO thin films by laser ablation of Zn:Mg target
2008; Elsevier BV; Volume: 255; Issue: 10 Linguagem: Inglês
10.1016/j.apsusc.2008.07.105
ISSN1873-5584
AutoresTae Hyun Kim, Jin Jae Park, Sang Hwan Nam, Hye Sun Park, Nu Ri Cheong, Jae Kyu Song, Seung Min Park,
Tópico(s)Electronic and Structural Properties of Oxides
ResumoMg-doped ZnO thin films were fabricated by laser ablation of Zn:Mg targets consisting of Mg metallic strips and Zn disk in oxygen atmosphere with a goal to facilitate convenient control of Mg contents in the films. The characteristics of the deposited films were examined by analyzing their photoluminescence (PL), X-ray diffraction and X-ray photoelectron spectroscopy (XPS) spectra. Mg contents as analyzed by XPS indicate that the target composition is fairly transferred to the deposited films. The wurtzite structure of ZnO was conserved even for the highly doped ZnO films and there was no Mg- or MgO-related XRD peaks. With increase in the Mg content, the bandgap and PL peak energy shifted to blue and the Stokes shift became larger.
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