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Extreme-ultraviolet spectral purity and magnetic ion debris mitigation by use of low-density tin targets

2006; Optica Publishing Group; Volume: 31; Issue: 10 Linguagem: Inglês

10.1364/ol.31.001549

1539-4794

S. S. Harilal, M. S. Tillack, Y. Tao, B O'Shay, R. R. Paguio, A. Nikroo,

X-ray Spectroscopy and Fluorescence Analysis

We investigate the extreme-ultraviolet (EUV) emission from targets that contain tin as an impurity and the advantages of using these targets for ion debris mitigation by use of a magnetic field. The EUV spectral features were characterized by a transmission grating spectrograph. The in-band EUV emission energy was measured with a calorimeter of absolute calibration. The ion flux coming from the plume was measured with a Faraday cup. Our studies indicate that 0.5% Sn density is necessary to obtain a conversion efficiency very close to that of full-density Sn. The use of Sn-doped low-Z targets provides a narrower unresolved transition array and facilitates better control of energetic ions in the presence of a moderate magnetic field of 0.64 T.