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Amorphous silicon-hydrogen-fluorine-oxygen alloys

1980; Elsevier BV; Volume: 35-36; Linguagem: Inglês

10.1016/0022-3093(80)90612-2

1873-4812

Bernard J. Feldman,

Ga2O3 and related materials

Abstract Amorphous silicon-hydrogen-fluorine-oxygen alloys have been grown by the plasma deposition of a SiF 4 /H 2 gas mixture. The composition and optical properties of these alloys are very similar to those of Knights' amorphous silicon-hydrogen alloys, but are significantly different from those of Ovshinsky and Madan's amorphous silicon-fluorine-hydrogen alloys.