Portal de Periódicos da CAPES

Photoluminescence of polymer-like amorphous carbon films grown in different plasma reactors

1998; Elsevier BV; Volume: 227-230; Linguagem: Inglês

10.1016/s0022-3093(98)00147-1

1873-4812

J.E. Bourée, T. Heitz, C. Godet, B. Drévillon, J. P. Conde, V. Chu, Mário N. Berberan‐Santos, А.А. Федоров,

Semiconductor materials and devices

The visible photoluminescence (PL) properties (emission and excitation spectra) of hydrogenated amorphous carbon (a-C:H) have been investigated for polymer-like thin films grown at low substrate temperature and small ion energies. For a large number of a-C:H films grown in three reactors (dual-mode plasma, radio frequency plasma and electron cyclotron resonance plasma) the emission spectra appear as a sum of three peaks with energies (a) 2.28 eV, (b) 2.65 eV and (c) 2.95 eV, being independent of the excitation energy (3.54 eV or 4.13 eV). Their relative intensities depend on the growth parameters while their positions are almost independent. Preliminary picosecond time-resolved PL data indicate a decrease of the decay time for increasing emission energies. A two-phase model of a-C:H is proposed to explain the PL excitation spectra.