Periodic Large‐Area Metallic Split‐Ring Resonator Metamaterial Fabrication Based on Shadow Nanosphere Lithography
2009; Wiley; Volume: 5; Issue: 3 Linguagem: Inglês
10.1002/smll.200800923
ISSN1613-6829
AutoresMichael C. Gwinner, Elisabeth Koroknay, Liwei Fu, Piotr Patoka, Witold Kandulski, Michael Giersig, Harald Gießen,
Tópico(s)Photonic and Optical Devices
ResumoAbstract A fast and cheap, large‐area (>1 cm 2 ), high‐coverage fabrication technique for periodic metallic split‐ring resonator metamaterials is presented, which allows control of inner‐ and outer‐ring diameters, gap angles, as well as thickness and periodicity. This method, based on shadow nanosphere lithography, uses tilted‐angle‐rotation thermal evaporation onto Langmuir–Blodgett‐type monolayers of close‐packed polystyrene nanospheres. Excellent agreement of the process parameters with a simplified model is demonstrated. Pronounced, tunable optical metamaterial resonances in the range of 100 THz are consistent with simulations.
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