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Study of the structural quality of heteroepitaxial silicon-on-sapphire structures by high-resolution X-ray diffraction, X-ray reflectivity, and electron microscopy

2014; Pleiades Publishing; Volume: 59; Issue: 3 Linguagem: Inglês

10.1134/s1063774514030043

1562-689X

А. Е. Благов, A. L. Vasiliev, A. S. Golubeva, I. A. Ivanov, Oleg A. Kondratev, Yu. V. Pisarevsky, M. Yu. Presnyakov, П. А. Просеков, A. Yu. Seregin,

Thin-Film Transistor Technologies