Depth profile analysis with monolayer resolution using elastic recoil detection (ERD)
1998; Institute of Physics; Volume: 42; Issue: 1 Linguagem: Inglês
10.1209/epl/i1998-00547-6
ISSN1286-4854
AutoresG. Dollinger, C.M. Frey, A. Bergmaier, T. Faestermann,
Tópico(s)Integrated Circuits and Semiconductor Failure Analysis
ResumoThe conditions for obtaining optimum depth resolution in elastic recoil detection (ERD) analysis of thin films using high-energy heavy ions are investigated. We estimate the principle limits given by energy straggling and small-angle scattering effects and show that monolayer depth resolution can be expected under optimized experimental conditions. Such a resolution is demonstrated in an ERD experiment for the first time by discrete signals of adjacent (002) graphite layers which is obtained using a 60 MeV 127I23+ ion beam and detecting 12C5+ recoils with a magnetic spectrograph.
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