Surface micromachined tunable 155 μm-VCSEL with 102 nm continuous single-mode tuning
2011; Optica Publishing Group; Volume: 19; Issue: 18 Linguagem: Inglês
10.1364/oe.19.017336
ISSN1094-4087
AutoresChristian Gierl–Mayer, Tobias Gruendl, Pierluigi Debernardi, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Sandro Jatta, Franko Küppers, P. Meißner, M.-C. Amann,
Tópico(s)Molecular Junctions and Nanostructures
ResumoFor the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102 nm in the range of 1550 nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5 mW and is > 2 mW over the entire tuning range. The sidemode suppression ratios are > 45 dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with surface micro-machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).
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