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Glancing-incidence X-ray diffraction for depth profiling of polycrystalline layers

2006; Wiley; Volume: 39; Issue: 2 Linguagem: Inglês

10.1107/s0021889805042779

1600-5767

Paolo Colombi, P. Zanola, Elza Bontempi, R. Roberti, Marcello Gelfi, Laura E. Depero,

Integrated Circuits and Semiconductor Failure Analysis

On the basis of glancing-incidence X-ray diffraction (GIXRD) spectra collected at different incidence angles, it is possible to obtain structural information at different depths. In the case of an ideal crystalline material, the integrated intensity of each crystalline-phase reflection is correlated to the irradiated volume of the phase. In this work, it is shown that quantitative information on the thickness of thin polycrystalline layers can be obtained by means of GIXRD. Experiments have been performed on thin films of gold with different thicknesses, sputtered on glass slides. The film thickness has been carefully evaluated by X-ray reflectivity (XRR) experiments. XRR and GIXRD data are compared, and the consistency of the thickness values of the crystalline gold layer is shown.