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Interaction between self-interstitials and substitutional C in silicon: Interstitial trapping and C clustering mechanism

2002; American Physical Society; Volume: 65; Issue: 4 Linguagem: Inglês

10.1103/physrevb.65.045209

1095-3795

S. Mirabella, Alessandro Coati, D. De Salvador, E. Napolitani, Alessandro Mattoni, G. Bisognin, M. Berti, A. Carnera, A. V. Drigo, Silvia Scalese, S. Pulvirenti, A. Terrasi, F. Priolo,

Semiconductor materials and interfaces

In this work the Si self-interstitial--carbon interaction has been experimentally investigated and modeled. The interactions between self-interstitials, produced by 20-keV silicon implantation, and substitutional carbon in silicon have been studied using a ${\mathrm{Si}}_{1\ensuremath{-}y}{\mathrm{C}}_{y}$ layer grown by molecular beam epitaxy (MBE) and interposed between the near-surface self-interstitial source and a deeper B spike used as a marker for the Si-interstitial concentration. The C atoms, all incorporated in substitutional sites and with a C-dose range of $7\ifmmode\times\else\texttimes\fi{}{10}^{12}--4\ifmmode\times\else\texttimes\fi{}{10}^{14}{\mathrm{a}\mathrm{t}\mathrm{o}\mathrm{m}\mathrm{s}/\mathrm{c}\mathrm{m}}^{2},$ trap the self-interstitials in such a manner that the ${\mathrm{Si}}_{1\ensuremath{-}y}{\mathrm{C}}_{y}$ layer behaves as a filtering membrane for the interstitials flowing towards the bulk and, consequently, strongly reduces the boron-enhanced diffusion. This trapping ability is related to the total C dose in the ${\mathrm{Si}}_{1\ensuremath{-}y}{\mathrm{C}}_{y}$ membrane. Substitutional carbon atoms interacting with self-interstitials are shown to trap Si interstitials, to be removed from their substitutional sites, and to precipitate into the C-rich region. After precipitation, C atoms are not able to further trap injected self-interstitials, and the interstitials generated in the surface region can freely pass through the C-rich region and produce B-enhanced diffusion. The atomistic mechanism leading to Si-interstitial trapping has been investigated by developing a simulation code describing the migration of injected interstitials. The simulation takes into account the surface recombination, the interstitial diffusion in our MBE-grown material, and C traps. Since the model calculates the amount of interstitials that actually react with C atoms, by a comparison with the experimental data it is possible to derive quantitative indications of the trapping mechanism. It is shown that one Si interstitial is able to deactivate about two C traps by means of interstitial trapping and C clustering reactions. The reaction causing trapping and deactivation is tentatively described.