(Bio-)chemical and physical microsensor arrays using an identical transducer principle
2001; Elsevier BV; Volume: 47; Issue: 1-2 Linguagem: Inglês
10.1016/s0013-4686(01)00562-x
ISSN1873-3859
AutoresArshak Poghossian, H. Lüth, J.W. Schultze, Michael J. Schöning,
Tópico(s)Mechanical and Optical Resonators
ResumoA new concept based on an identical transducer principle and structure for both (bio-)chemical and physical sensors is presented. For all sensors, the field effect is used as transducer principle. In this approach, the same chemical sensor is employed also as a physical sensor. A novel design of a temperature sensor on the basis of a differential arrangement of two identical ISFETs operating in different working points is demonstrated. A multifunctionality of the sensor system is achieved by means of different sensor arrangements and/or operation modes. Thus, the number of the obtained (bio-)chemical and physical quantities, like ion concentration, temperature, flow rate can be higher than the number of the sensors applied. A hybrid sensor module, for the pH, penicillin and temperature determination is realised and its performance has been investigated.
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