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Master replication into thermosetting polymers for nanoimprinting

2000; American Institute of Physics; Volume: 18; Issue: 6 Linguagem: Inglês

10.1116/1.1319821

1520-8567

H. Schulz, D. Lyebyedyev, Hella‐Christin Scheer, K. Pfeiffer, G. Bleidießel, Gabi Grützner, Jouni Ahopelto,

Microfluidic and Capillary Electrophoresis Applications

Replication of the e-beam master into thermosetting polymers was investigated for low cost working stamp fabrication for nanoimprint lithography (NIL). Negative as well as positive replicas from a master were fabricated in a thermal replication step from duroplastic material. Without any further treatment these working stamps were able to imprint thermoplastic polymers. To demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-9030 as well as PMMA for comparison. All replications were done in a NIL process. The replication quality is excellent when a suitable imprint procedure is used.