Artigo Revisado por pares

Epitaxial growth and properties of Ga-doped ZnO films grown by pulsed laser deposition

2003; Elsevier BV; Volume: 259; Issue: 1-2 Linguagem: Inglês

10.1016/j.jcrysgro.2003.07.007

ISSN

1873-5002

Autores

Z.F. Liu, Fukai Shan, Yongxiang Li, Byoungchul Shin, Yun Seop Yu,

Tópico(s)

Copper-based nanomaterials and applications

Resumo

Epitaxial films of gallium-doped zinc oxide (GZO) have been deposited on sapphire (0 0 0 1) substrates by pulsed laser deposition method. X-ray diffraction, photoluminescence (PL) and spectroscopic ellipsometry (SE) were used to characterize the films. It was found that the epitaxial growth of GZO films could be obtained for a substrate temperature at 400°C and the high quality epitaxial films were obtained at 500°C. The PL spectra of epitaxial GZO films showed a near band edge (NBE) emission peak and a broad orange deep-level emission peak. The NBE emission had a blue shift while the deep-level emission shifted to lower energy comparing with those of pure ZnO films. The refractive indices were obtained from the fitting of the SE data by Sellmeier dispersion relation.

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