Artigo Acesso aberto Revisado por pares

Large‐Area 3D Nanostructures with Octagonal Quasicrystalline Symmetry via Phase‐Mask Lithography

2007; Volume: 19; Issue: 10 Linguagem: Inglês

10.1002/adma.200700178

ISSN

1521-4095

Autores

Ion Bita, Taeyi Choi, Michael Walsh, Henry I. Smith, Edwin L. Thomas,

Tópico(s)

Mineralogy and Gemology Studies

Resumo

Advanced MaterialsVolume 19, Issue 10 p. 1403-1407 Communication Large-Area 3D Nanostructures with Octagonal Quasicrystalline Symmetry via Phase-Mask Lithography† I. Bita, I. Bita [email protected] Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (USA)Search for more papers by this authorT. Choi, T. Choi Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (USA)Search for more papers by this authorM. E. Walsh, M. E. Walsh Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (USA) Present address: Lumarray, Inc., 15 Ward St, Somerville, MA 02143, USASearch for more papers by this authorH. I. Smith, H. I. Smith Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (USA)Search for more papers by this authorE. L. Thomas, E. L. Thomas [email protected] Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (USA)Search for more papers by this author I. Bita, I. Bita [email protected] Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (USA)Search for more papers by this authorT. Choi, T. Choi Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (USA)Search for more papers by this authorM. E. Walsh, M. E. Walsh Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (USA) Present address: Lumarray, Inc., 15 Ward St, Somerville, MA 02143, USASearch for more papers by this authorH. I. Smith, H. I. Smith Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (USA)Search for more papers by this authorE. L. Thomas, E. L. Thomas [email protected] Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (USA)Search for more papers by this author First published: 19 April 2007 https://doi.org/10.1002/adma.200700178Citations: 35 † We thank Dr. J. Yoon for assistance with confocal microscopy. This work was partially supported by the MRSEC program of the National Science Foundation under award number DMR 02-13282, by a Division of Materials Research Polymer Program NSF grant DMR-0308133 to ELT, and further partially supported by the U.S. Army Research Office through the Institute for Soldier Nanotechnologies, under Contract DAAD-19-02D-0002. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat Graphical Abstract 3D nanostructured quasicrystalline materials significantly larger than feasible with previously reported techniques are produced. 2D quasiperiodic surface relief templates with 8mm point group symmetry are made by multiple-exposure interference lithography. Phase-mask lithography with corresponding PDMS masks produce bicontinuous 3D axial quasicrystal SU-8 structures (see figure). REFERENCES 1 D. Levine, P. J. Steinhardt, Phys. Rev. Lett. 1984, 53, 2477. 2 D. Shechtman, I. Blech, D. Gratias, J. W. Cahn, Phys. Rev. Lett. 1984, 53, 1951. 3 C. Janot, in Quasicrystals: A Primer, Clarendon, New York 1994. 4 E. Yablonovitch, Phys. Rev. Lett. 1987, 58, 2059. 5 J. D. Joannopoulos, R. D. Meade, J. N. Winn, in Photonic Crystals: Molding the Flow of Light, Princeton University Press, Princeton, NJ 1995. 6 Y. S. Chan, C. T. Chan, Z. Y. Liu, Phys. Rev. Lett. 1998, 80, 956. 7 M. E. Zoorob, M. D. B. 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