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Efficiency of a grazing-incidence off-plane grating in the soft-x-ray region

2006; Optica Publishing Group; Volume: 45; Issue: 8 Linguagem: Inglês

10.1364/ao.45.001680

0003-6935

J. F. Seely, Leonid I. Goray, Benjawan Kjornrattanawanich, J. M. Laming, Glenn Holland, Kathryn A. Flanagan, Ralf K. Heilmann, Chih‐Hao Chang, Mark L. Schattenburg, Andrew P. Rasmussen,

Advancements in Photolithography Techniques

Efficiency measurements of a grazing-incidence diffraction grating in the off-plane mount were performed using polarized synchrotron radiation. The grating had 5000 grooves/mm, an effective blaze angle of 14 degrees, and was gold coated. The efficiencies in the two polarization orientations (TM and TE) were measured in the 1.5-5.0 nm wavelength range and were compared with the efficiencies calculated using the PCGrate-SX code. The TM and TE efficiencies differ, offering the possibility of performing unique science studies of astrophysical, solar, and laboratory sources by exploiting the polarization sensitivity of the off-plane grating.