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Characterisation of the University of Surrey Ion Beam Centre in-air scanning microbeam

2005; Elsevier BV; Volume: 231; Issue: 1-4 Linguagem: Inglês

10.1016/j.nimb.2005.01.029

1872-9584

Michael J. Merchant, P. Mistry, M. Browton, A.S. Clough, F.E. Gauntlett, C. Jeynes, K.J. Kirkby, G.W. Grime,

Integrated Circuits and Semiconductor Failure Analysis

The University of Surrey Ion Beam Centre has recently commissioned a new in-air scanning microbeam. The new external beam uses a magnetic quadrupole doublet to focus a beam-spot of μm dimensions on the vacuum exit window so that there are no beam defining apertures close to the analysis region. A pre-lens magnetic dipole allows beam scanning for measuring two dimensional elemental distributions. The scanned area is limited by the diameter of the exit window to 3 mm diameter at present. The sample is positioned using a front viewing video microscope and an alignment laser, and detectors for X-rays (high energy and low energy), backscattered particles and gamma rays are installed. This paper will detail the ion optical characteristics of the in-air scanning microbeam, and the methods used in the characterisation. A comparison between calculated optical properties of the in-air scanning microbeam, using the ray-tracing software TRAX, and the measured properties of the beam will be presented.