A sensitive Pirani vacuum sensor and the electrothermal SPICE modelling
1996; Elsevier BV; Volume: 53; Issue: 1-3 Linguagem: Inglês
10.1016/0924-4247(96)01158-2
ISSN1873-3069
AutoresBruce C. S. Chou, Yeong-Maw Chen, Mang Ou‐Yang, Jin‐Shown Shie,
Tópico(s)Advanced Sensor Technologies Research
ResumoA sensitive micro-Pirani vacuum sensor has been fabricated. With effective schemes of ambient-temperature compensation and stabilization, it is capable of measuring vacuum pressure linearly from 1 torr down to 10−7 torr, a three orders-of-magnitude improvement in resolution over conventional gauges. A special electrothermal SPICE model, complementary to the conventional analog representation of thermal parameters, is also proposed. It allows a high-level sensor-circuit integrated simulation based on the most fundamental principle and thermal variables. Good agreement between the measured data obtained from a constant-temperature readout circuit and the simulation result is demonstrated.
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