Micro ultrasonic machining and its applications in MEMS
1996; Elsevier BV; Volume: 57; Issue: 2 Linguagem: Inglês
10.1016/s0924-4247(97)80107-0
ISSN1873-3069
AutoresXi-Qing Sun, T. Masuzawa, Masahisa Fujino,
Tópico(s)Advanced Surface Polishing Techniques
ResumoA combined machining method, micro ultrasonic machining (micro-USM), is proposed here for the fabrication of three-dimensional (3D) microstructures with high aspect ratios. Wire electro-discharge grinding (WEDG) and electro-discharge machining (EDM) are combined onto the USM machine to provide a capability of making co-axial microtools for USM and, thereafter, microholes as small as 15 μm in diameter and a variety of high-aspect-ratio microstructures on brittle materials have been achieved for the first time by optimizing the ultrasonic machining processes. The combination of WEDG, EDM and USM on a micro-USM machine also makes possible the construction of complete 3D micromachines within one total manufacturing process. With this method, a 3D micro center-pin bearing air turbine has been successfully developed. The design, fabrication and testing issues are described in this paper.
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