Design and analysis of a silicon-based antiresonant reflecting optical waveguide chemical sensor
1996; Optica Publishing Group; Volume: 21; Issue: 16 Linguagem: Inglês
10.1364/ol.21.001241
ISSN1539-4794
AutoresKate A. Remley, Andreas Weisshaar,
Tópico(s)Semiconductor Lasers and Optical Devices
ResumoThe design of a silicon-based antiresonant reflecting optical waveguide (ARROW) chemical sensor is presented, and its theoretical performance is compared with that of a conventional structure. The use of an ARROW structure permits incorporation of a thick guiding region for efficient coupling to a single-mode fiber. A high-index overlay is added to fine tune the sensitivity of the ARROW chemical sensor. The sensitivity of the sensor is presented, and design trade-offs are discussed.
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