Copper-doped SnO2 thin films for PH3 detection
1992; Elsevier BV; Volume: 217; Issue: 1-2 Linguagem: Inglês
10.1016/0040-6090(92)90628-o
ISSN1879-2731
AutoresT. Ratcheva, Irinа Stambolova, Konstantin Konstantinov,
Tópico(s)Advanced Chemical Sensor Technologies
ResumoAbstract Thin copper-doped SnO 2 films have been shown to exhibit sensitivity to PH 3 in the region of its threshold limit concentrations in air. The films were deposited by spraying alcohol solutions of SnCl 4 and CuCl 2 over hot quartz substrates with subsequent annealing in an oxygen atmosphere at high temperatures. The phase and chemical composition of the films were investigated, using X-ray phase and electron diffraction analyses and X-ray photoemission spectral and Auger emission spectral analyses. The gas sensitivity was estimated by the change in the electrical resistance of the film in the absence and in the presence of PH 3 . The films prepared by spraying working solutions with molar ratio CuCl 2 :SnCl 4 = 1:4 exhibit the highest sensitivity towards 0.1 ppmn PH 3 ( R air / R gas = 15.5) at 170°C. At this temperature the selectivity with respect to hydrogen is at its highest.
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