Environmentally friendly patterning of molecular waterwheel (Noria) in supercritical carbon dioxide
2009; Royal Society of Chemistry; Volume: 19; Issue: 26 Linguagem: Inglês
10.1039/b821475a
ISSN1364-5501
AutoresManabu Tanaka, Abhinav Rastogi, Hiroto Kudo, Daisuke Watanabe, Tadatomi Nishikubo, Christopher K. Ober,
Tópico(s)Carbon Nanotubes in Composites
ResumoAn environmentally friendly development process using supercritical carbon dioxide (scCO2) was applied to a novel molecular glass resist made from a molecular waterwheel ('Noria'), and patterned by electron-beam (EB) lithography. The physical and lithographic properties of a Noria derivative, tert-butoxycarbonyl-protected Noria ('Noria-BOC'), were examined to evaluate it as a next-generation resist in terms of its solubility, film-forming ability, thermal stability, photosensitivity, and patterning properties. FT-IR spectra and contrast curve studies revealed the good photo-induced deprotection reactivity of Noria-BOC and the excellent negative-tone characteristics of scCO2 development, respectively. The EB-patterning of Noria-BOC followed by development in scCO2 gave clear lithographic patterns with sub-100 nm resolution.
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