Cadmium–tin-oxide films deposited by dc reactive sputtering from a Cd-Sn alloy target
1980; American Institute of Physics; Volume: 37; Issue: 2 Linguagem: Inglês
10.1063/1.91816
ISSN1520-8842
AutoresNaoyuki Miyata, K. Miyake, Yuji Yamaguchi,
Tópico(s)Copper-based nanomaterials and applications
ResumoCadmium–tin-oxide films with high conductivity and high visible transmission were prepared by dc reactive sputtering from a Cd-Sn alloy target in an Ar-O2 atmosphere. The electrical and optical properties of these films were found to depend strongly uponthe oxygen concentration in an Ar-O2 atmosphere during deposition. Films with a lowest resistivity of 2.0×10−4 Ω cm and a highest transmission of 90% over the visible region have been obtained for a 6% oxygen concentration in an Ar-O2 atmosphere.
Referência(s)