Measurement of carbon contamination in barium strontium titanate films
1995; Elsevier BV; Volume: 29; Issue: 1-4 Linguagem: Inglês
10.1016/0167-9317(95)00143-3
ISSN1873-5568
AutoresW.B. Stannard, Peter Johnston, J. F. Scott, I.F. Bubb, Robert L. Walker, David D. Cohen, N. Dytlewski, J.W. Martin,
Tópico(s)Ion-surface interactions and analysis
ResumoFerroelectric films are being developed for use in DRAMs. The films are often manufactured using spin-on techniques making contamination with residual carbon inevitable. The concentration of carbon is rarely known and its effect not understood. This paper describes the analysis of barium strontium titanate (BST) films for carbon content using both Mass and Energy Dispersive Recoil Spectrometry (RS) with 77 MeV 127I ions and Nuclear Reaction Analysis (NRA) using the 12(3He,p0)14N reaction.
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